Axus Technology

About Axus Technology

Based in Chandler, Arizona, Axus Technology operates as a specialized engineering firm and original equipment manufacturer (OEM) for the semiconductor industry. The company was co-founded in 2002 by Dan Trojan, who currently serves as President and CEO. Trojan's career in the semiconductor equipment sector began in 1984, including a role as Director of Planarization Engineering at Strasbaugh and Program Director at Novellus (SpeedFam/IPEC), providing him with extensive experience in semiconductor equipment design and engineering before establishing Axus.

Axus Technology's business model centers on providing advanced surface processing solutions, which includes the design, manufacture, and servicing of equipment, as well as process development and foundry services. The company serves a diverse client base, ranging from large-scale semiconductor manufacturers to smaller research and development facilities across sectors like MEMS, automotive, aerospace, and IoT. Revenue is generated through the sale of new and remanufactured equipment, parts and services, and by offering its in-house foundry for process development and optimization.

The company's core offerings are in Chemical Mechanical Planarization (CMP), wafer thinning, grinding, and substrate cleaning. A key product is the Capstone® platform, the first new 150/200mm CMP system brought to the market in over three decades, which can process two different wafer sizes at the same time. The Capstone system is noted for its ability to handle difficult-to-planarize materials like silicon carbide (SiC) by processing at higher pressures and velocities. Another significant product is the Aquarius™ Wafer Cleaner, which can be integrated with the Capstone system to provide a combined CMP and post-CMP cleaning solution. In May 2024, Axus secured $12.5 million in capital funding to expand the production of its CMP products, specifically for silicon carbide device manufacturing.