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Angstrom Excellence / 埃芯半导体

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Shenzhen OCD, overlay and X-ray semiconductor metrology equipment

Shenzhen, ChinaFounded 2020Semiconductors
Valuation $500M–1B Last recorded · 2026
Total funding $100–500M Disclosed equity funding
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About Angstrom Excellence / 埃芯半导体

Shenzhen Angstrom Excellence Technology Co., Ltd. (埃芯半导体 / Angstrom Excellence) develops front-end semiconductor optical and X-ray metrology equipment for advanced wafer fabs. Founded in 2020, the company builds OCD critical-dimension, overlay, thin-film and integrated optical metrology tools plus X-ray thickness, diffraction, light-element and XPS platforms under the High Yield and Athena Xcellence lines.

Its systems support advanced Logic, DRAM and 3D NAND process control and are already in volume use at leading Chinese fabs. Angstrom Excellence operates R&D and production in Shenzhen (Longhua) with branches in Shanghai, Wuhan, Beijing and Hefei, and has been backed by National Integrated Circuit Industry Investment Fund Phase II. Public headcount estimates range roughly from the high 200s toward ~400 as shipments scale.

Products include High Yield Competence OCD, High Yield Overlay diffraction overlay metrology, High Yield film-thickness and IM integrated tools, and multiple Athena Xcellence X-ray metrology series for production and scientific instruments customers.

Source: Dealroom company data

At a glance

Status
Operational
Founded
2020
Headquarters
Shenzhen, China
Open positions
None listed
Dealroom signal
21.7/100
Industry
Semiconductors
Sector
Semiconductors, Semiconductor Test and Measurement, DT and LS, science-based
Technology
Deep Tech
Business model
Manufacturing
Client focus
b2b
Links
Website

Funding history

2 recorded events

Company financing events and reported valuations.

Deal typeDateAmountValuationInvestorsSource
SERIES BOther financing Feb 2026 $28M $110M CFT Capital · Shenzhen Capital Group · Changjiang Capital ↗
SERIES BOther financing Jan 2024 $28M $110M Shenzhen Capital Group · GP Capital · FutureX Capital · Warworth Fund ↗
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Growth signals

Angstrom Excellence / 埃芯半导体 website traffic

Latest recorded traffic for Angstrom Excellence / 埃芯半导体 is 1.7K monthly website visits, up 198.2% over the last three months.

Latest monthly visits1.7K 3-month web change+198.2%
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Similar companies

Closest operating peers by Dealroom taxonomy

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Investments and acquisitions

Capital deployed

Recent portfolio relationships for companies that also act as investors or acquirers.

Investors

11 investors on the cap table

From Dealroom's funding and investor records, grouped by the round each investor first entered.

Series A11 investors entered at this stage

  • Shenzhen Capital Group
  • GP Capital
  • FutureX Capital
  • Warworth Fund
  • CRF Investment
  • Shenzhen Cornerstone Asset Management
  • Changjiang Capital
  • Zhejiang Venture Capital Group
  • Tengyi Equity
  • Komsomolsk Wavos No. 5 Venture Capital Partnership
  • CFT Capital
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Talent movements Hidden — book a demo in · Hidden — book a demo out past 12 months

Source: Dealroom Talent Intelligence.

Global footprint

Workforce and web traffic by country
Workforce by country
🇨🇳 China · Shenzhen HQ
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Market sentiment

Posts on X, past 7 days

An AI-synthesised read of the highest-engagement posts about Angstrom Excellence / 埃芯半导体 on X, ranked by likes and reposts, corporate channels excluded.

Reading the room on X — pulling top posts and synthesizing themes…

Source: X recent search ranked by engagement (likes + retweets) · Synthesis by Claude · Cached for 1 hour

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