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Angstrom Excellence / 埃芯半导体
Shenzhen OCD, overlay and X-ray semiconductor metrology equipment
About Angstrom Excellence / 埃芯半导体
Shenzhen Angstrom Excellence Technology Co., Ltd. (埃芯半导体 / Angstrom Excellence) develops front-end semiconductor optical and X-ray metrology equipment for advanced wafer fabs. Founded in 2020, the company builds OCD critical-dimension, overlay, thin-film and integrated optical metrology tools plus X-ray thickness, diffraction, light-element and XPS platforms under the High Yield and Athena Xcellence lines.
Its systems support advanced Logic, DRAM and 3D NAND process control and are already in volume use at leading Chinese fabs. Angstrom Excellence operates R&D and production in Shenzhen (Longhua) with branches in Shanghai, Wuhan, Beijing and Hefei, and has been backed by National Integrated Circuit Industry Investment Fund Phase II. Public headcount estimates range roughly from the high 200s toward ~400 as shipments scale.
Products include High Yield Competence OCD, High Yield Overlay diffraction overlay metrology, High Yield film-thickness and IM integrated tools, and multiple Athena Xcellence X-ray metrology series for production and scientific instruments customers.
Source: Dealroom company dataAt a glance
- Status
- Operational
- Founded
- 2020
- Headquarters
- Shenzhen, China
- Open positions
- None listed
- Dealroom signal
- 21.7/100
- Industry
- Semiconductors
- Sector
- Semiconductors, Semiconductor Test and Measurement, DT and LS, science-based
- Technology
- Deep Tech
- Business model
- Manufacturing
- Client focus
- b2b
- Links
- Website
Knowledge graph
More headlines
Funding history
Company financing events and reported valuations.
| Deal type | Date | Amount | Valuation | Investors | Source |
|---|---|---|---|---|---|
| SERIES BOther financing | Feb 2026 | $28M | $110M | CFT Capital · Shenzhen Capital Group · Changjiang Capital | ↗ |
| SERIES BOther financing | Jan 2024 | $28M | $110M | Shenzhen Capital Group · GP Capital · FutureX Capital · Warworth Fund | ↗ |
Growth signals
Latest recorded traffic for Angstrom Excellence / 埃芯半导体 is 1.7K monthly website visits, up 198.2% over the last three months.
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Investments and acquisitions
Recent portfolio relationships for companies that also act as investors or acquirers.
Investors
From Dealroom's funding and investor records, grouped by the round each investor first entered.
Series A11 investors entered at this stage
Shenzhen Capital Group- GCGP Capital
FutureX Capital- WFWarworth Fund
- CICRF Investment
- SMShenzhen Cornerstone Asset Management
- CCChangjiang Capital
- ZGZhejiang Venture Capital Group
- TETengyi Equity
- KPKomsomolsk Wavos No. 5 Venture Capital Partnership
CFT Capital
Source: Dealroom Talent Intelligence.
Global footprint
Market sentiment
An AI-synthesised read of the highest-engagement posts about Angstrom Excellence / 埃芯半导体 on X, ranked by likes and reposts, corporate channels excluded.
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Source: X recent search ranked by engagement (likes + retweets) · Synthesis by Claude · Cached for 1 hour
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